Fabrication of Micro Diamond Tools by Electroless Composite Plating and Micro Grinding

Abstract

This research deals with the development of micro grinding tools fabricated by electroless Ni-P composite plating with 5-10μm sized diamond grits and micro grinding. In this study, the fabrication of micro grinding tools for the grit amount was investigated and two kinds of tools were fabricated. The tools were used to micro grooving or drilling. Grooving with a groove depth of 100μm could be performed to about 600mm on silicon. Also micro drilling was possible in silicon, quartz glass and metallic glass.