Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : November 07, 2007 - November 09, 2007
This research proposes a new application of Michelson laser interferometer for roundness measurement. Michelson laser interferometer is the high precision length measurement in the resolution of one nanometer. The optical setup is described and the theory is derived. This measurement system composes of laser interferometer, a single-axis rotary table and a glass hemisphere. The roundness of glass hemisphere is the result of this experiment where are located and rotated by single-axis rotary table. A laser interferometer reflector mirror is placed on moving slide which can move along the glass hemisphere surface. The displacement of reflector along glass hemisphere results to the radius of glass hemisphere at each sampling angle. The uncertainly of this system is determined from the laser interferometer uncertainty, rotary table uncertainty and environment. Experimental results show that the roundness, refer to The Japan International Standard (JIS) roundness measurement result of the glass hemisphere is 0.223 μm and measurement uncertainty ± 0.0814 μm. The roundness of this glass hemisphere from convectional method is 0.06 μm. Experiment results show the proposed approach can be applied for roundness measurement.
