Nano-surface Generation of Glass Using Low-pressure Super-finishing with Fine-grit Stones

Abstract

We have developed a new low pressure method for obtaining a finer finish in super-finishing using diamond abrasive stones. This is a finer finish with very small stock removal, than ordinarily occurs in a conventional process using aluminum oxide or silicon carbide stones. Super-finishing was attempted using low pressures (less than 0.5 MPa) with diamond abrasives averaging less than 3 μm in diameter. As a result, we could obtain nano-order surface finishes with depth of cut control of sharp diamond edge.