Application of Ultra-Precision Diamond Cutting for Fabrication of Cylindrical Micro Coil Line

抄録

This paper describes an application of ultra-precision diamond cutting for a cylindrical micro coil line in a fabrication process by lithography. The coil lines fabricated by UV or X-ray lithography are electroplated by nickel and copper. The direct cutting of the resist and electroplating structure by diamond tool is attempted to finish the flat surface. The fluctuation of the resist thickness is reduced to 1μm or less by diamond cutting. By applying the diamond cutting operation in the conventional lithograph process, the micro coil with the line-and-space of 30μm is fabricated.