Accuracy Improvement of Ultraprecision Micromachining by Detecting Non-Rotational Diamond Cutting Tool Tip Position

抄録

In recent years, the demands for fabricating complicated microparts accurately and efficiently by means of multi-axis control ultraprecision machining centers are increasing. However, the accumulations of various kinds of errors deteriorate the form accuracy of machined microparts. To solve these problems, this study proposes a method to detect the tool tip position by means of electrical conduction between gold-coated non-rotational diamond cutting tool and the workpiece attached to 5-axis control machining center. From machined results with the compensated NC data, it is found that the method proposed in this study is effective to set the tool in the right position.