High-precision Machining by Measurement and Compensation of Motion Error

抄録

In order to achieve sub-micron-order geometrical accuracy efficiently, motion errors of machine tools should be reduced. This paper reports on a compensation result of motion errors in Z direction on XY plane. The repeatable error components due to the ball screw drive systems were modelled by using Fourier series. Z-axis was commanded to cancel the estimated motion errors and the variation of the relative displacement of the tool to the table was reduced from 1.3 μmP-V to 0.5 μmP-V. Machining experiments were also carried out and the straightness of the profile curve was reduced from 1.0 μm to 0.4 μm.