Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
Online ISSN : 2424-3086
ISSN-L : 2424-3086
2007.4
Session ID : 9D430
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Three-Dimensional Microfabrication System Using Focused Fiber Laser Beam
Takuya SEMBATesturo YAMAGUCHIYoshifumi AMAMOTO
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Abstract

A laser microfabrication system capable of fabricating three-dimensional microstructures using an ultraprecise machining center MC and a conventional CAM system was developed. Three-dimensional microstructures were fabricated by deepening a two-dimensional pocket obtained by scanning a laser beam in the x-y plane in the negative z-direction. A glasslike carbon having a laser beam absorption factor of over 80 % was used as a workpiece. It was verified by a machining test that free-formed surfaces could be fabricated by deepening two-dimensional pockets that could be made using both linear and circular motions of the MC in the negative z-direction.

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© 2007 The Japan Society of Mechanical Engineers
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