Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : November 07, 2007 - November 09, 2007
A laser microfabrication system capable of fabricating three-dimensional microstructures using an ultraprecise machining center MC and a conventional CAM system was developed. Three-dimensional microstructures were fabricated by deepening a two-dimensional pocket obtained by scanning a laser beam in the x-y plane in the negative z-direction. A glasslike carbon having a laser beam absorption factor of over 80 % was used as a workpiece. It was verified by a machining test that free-formed surfaces could be fabricated by deepening two-dimensional pockets that could be made using both linear and circular motions of the MC in the negative z-direction.