Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : November 07, 2007 - November 09, 2007
Effect of wavelength on machining characteristics of AlN and SiC in micro-drilling using Q-swithched YAG harmonic was experimentally investigated. The drilled depth increased with the decrease of wavelength. Besides, under the reduced pressure condition, the drilled depth increased and the better surface integrity could be obtained compared to the atmospheric condition. The circumference region around drilled hole was oxidized, and the oxidization in the case of fourth harmonic was more remarkable than that in second harmonic. In the initial stage of drilling for AlN, the thermal expansion was observed at the irradiated point in the case of fundamental wavelength, while higher harmonic made it possible to drill without thermal expansion.
