Abstract
This paper presents an approach for torque error compensation in an oscillating rotary pneumatic actuator. It is difficult to control the output torque of a pneumatic actuator precisely because of typical non-linear factors such as dead zone and pressure fluctuations in a pneumatic system. Thus, we proposed a hybrid actuator system which is integrated with an oscillating rotary pneumatic actuator and a voice coil motor (VCM) so as to compensate torque error in the pneumatic system by the VCM. Driving experimental results confirmed that the torque error in the pneumatic system is compensated by the VCM. Consequently, the hybrid actuator achieves high driving accuracy.