Abstract
The nano-motion control system of multiple degrees of freedom positioning in large travel ranges has been required in the field of precision engineering. In order to realize such a system, it is necessary and indispensable to develop a planar motion table system based on a new design concept. This paper presents a newly developed X-Y planar nano-motion table system with large travel ranges. This system is composed of a fine motion table and a coarse motion mechanism. Performance evaluation results confirm that the developed table system has a remarkable performance which includes nanometer positioning capability over large travel ranges.
