抄録
The authors propose a new nano fabrication process by using nano plastic forming in this paper. The proposed process consists of nano plastic forming, coating and polishing. In the first step, diamond tool is imprinted onto a soda glass substrate. And array of nano grooves are fabricated. Then, the fabricated glass is coated with nickel or aluminum by vapor deposition. Finally, the coated layer is removed by polishing. Through these processes, the array of metallic nano lines can be fabricated on the surface of glass substrate. In this study, the feasibility of the proposed process was confirmed by the experiment.
