Abstract
The use of microchannel chips (micro total analysis systems) have recently gained attention in the medical field. The photolithography technology used in semiconductor manufacturing is generally used to manufacture microchannel chip dies. However, this technology requires many processes, such as mask fabrication and the application of photoresist to a substrate, as well as expensive clean room facilities. In light of this, this study examines ways to form a fine groove using a micro end mill. This study experimentally examines the processing conditions that need to be developed, and as a result, we formulate selection guidelines for cutting conditions through which burring can be reduced.
