抄録
This study aims to discuss an application of self-assembled particles to a polishing tool. Self-assembly of fine particles is obtained by drying colloidal suspension on a substrate. Using dispenser and motored stage, the assembly can be obtained along specific profile like spiral. The assemblies are transferred to another substrate on which ultraviolet curing resin is spin-coated and cured while pressing the substrates each other. Silica particles of 1μm diameter were assembled over 20mm square and applied to polishing to evaluate the performance. It was found that the glass plate was machined with smooth finish. However, the particles drop off under severe conditions.
