抄録
This study has proposed a tool insert in which seven micro thermocouples are embedded in order to measure the temperatures on the tool rake face. Alumina ceramics tool insert was prepared for the substrate. An ultrasonic micro machining operation with a sandwich tool fabricated the micro grooves corresponding to the circuit patterns of the thermocouples. Copper and nickel films, which were the elements of the thermocouple, were deposited into the grooves using electroless plating and electroplating. This paper shows the fabrication process in detail and the characteristic of the thermo electromotive force of the micro thermocouples fabricated.
