抄録
Recently, micro holes processing on glass were focused on the chemical and the biological filed. The authors focused on the Electro-Chemical Discharge Machining (ECDM) to machine the micro holes for glass, and developed the ECDM device for machining micro holes on glass. This paper reports about the feedback circuit for machining-stop and the two-step machining which were developed to reduce the smallest diameter of the micro hole. Additionally, the tool electrode with diameter of 20μm was produced. As a result, the smallest diameter of the micro hole, 12μm in diameter was achieved.
