B015 Development of a micro/nano-scale constant load cutting mechanism measuring the cutting force by an optical lever

抄録

A non-rigid micro/nano scale cutting mechanism that is capable to fabricate micro-grooves in a surface of some square centimeters with a constant cutting depth and even on inclined surfaces has been developed. This mechanism is based on the control principle of the nano-cutting technique using an Atomic Force Microscope, where a cantilever with a diamond tool attached at its free edge is used to remove the material from the workpiece. Using an optical lever, the angular deformation at the tip of the cantilever is measure, allowing us to grasp the total cutting force involved during the machining process.