抄録
Micro-channel chips, which are used in micro total analysis systems, are attracting attention in the medical field. The photolithography technology used in semiconductor manufacturing is generally used to manufacture micro-channel chip dies. However, this technology requires many processes, such as mask fabrication and the application of photoresist to a substrate, as well as expensive clean room facilities. Therefore, this study examines how to form a fine groove by cutting with micro-endmills. This investigation experimentally examined a method for reducing the influence of tool run-out on machining accuracy with multi-tooth endmills. As a result, the effects of tool run-out on micro-groove milling, such as decrease in groove increment, were clarified.
