Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
Online ISSN : 2424-3086
ISSN-L : 2424-3086
セッションID: 1206
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1206 Numerical Modeling of Picosecond Laser Drilling of Glass
Yusuke ITOToru KIZAKINaohiko SUGITAMamoru MITSUISHI
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We discuss the laser-processing conditions for creating deep holes on glass substrates and build a numerical model for picosecond laser drilling based on the energy absorption. We obtained numerical and experimental results that agreed with each other, revealing that the depth of the holes is increased by increasing the repetition rate. Furthermore, we revealed that when the repetition rate is too high, the generation of cracks prevents the precise creation of holes.
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© 2015 一般社団法人 日本機械学会
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