抄録
A prototype measurement system by using a micro-probe is introduced for the precision measurement of the slit width. The stylus of the micro-probe is consisted of the thermally-pulled capillary glass tube and precision glass ball with 50 μm in diameter, so that the probe tip can be inserted into the inside of the micro-gap. A shear-force detection micro-probing is employed for the precision measurement of the slit width of the slot die coater. The measurement accuracy of the slit width measurement is investigated.
