Efficient Fabrication Process of Metallic Nanostructure for Optical Functional Surfaces

Abstract

In this research, efficient fabrication process of metallic nanostructures for optical functional surfaces was aimed. Acetone chemical stamping on Au-quartz bonding strength modification was examined by peeling-off using an adhesive. Based on the results, Fabrication processes for Au nanodot array combining nanomachining and bonding strength control were proposed. Nanomachining was utilized in fabrication of a mother mold. A thermoplastic stamp was fabricated by duplicating a negative structure from the mother mold. The stamp was then used in Au stamping to form a nano line and space structure on the substrate. Thermal dewetting was finally conducted to induce the self-organization of Au film for forming a nano dot array.