Detection Principle and Verification of Non-contact Displacement Meter with Pico-meter Resolution

抄録

Displacement sensors based on laser or optical fiber technology are well recognized for the non-contact measurement of distance by reflection from the object. These technologies limit the distance of measurement along with the increase of resolution. The other option could be light wave interferometer built with the mirrors on the object. However, long distance measurement requires large and stabilized-wavelength laser source. This report explains another solution; non-contact, grating interferometer displacement sensor which enables Pico-meter resolution with semiconductor laser source.