Influence of Preload and Retainer of Linear Ball Guides on Feed Drive System in Microscopic Motions

抄録

This paper describes influence of preload and retainer of linear ball guides on feed drive system in microscopic region which become important when the linear guides are used in precision machines. At first, relationships between nonlinear-spring-behaviors of the guide and behavior of quadrant glitches are analyzed based on proposed friction model. Behavior of the quadrant glitches, nanometer step responses and steady vibrations are also measured with the three different guide conditions; with/without ball retainers and preload changes. Time constant of the step responses are also analyzed based on the friction and control system model. From the analysis and experiments, it is clarified that the behavior of quadrant glitches and step responses are strongly influenced by the friction characteristics of the guides, and the behavior can adequately be estimated by the analysis. It is also clarified that the steady vibrations are also influenced by the friction characteristics, the amplitude of the vibration is proportional to the compliances of the nonlinear-spring-behavior.