主催: The Japan Society of Mechanical Engineers
会議名: 第9回 21世紀における先端生産工学・技術に関する国際会議 (LEM21)
開催日: 2017/11/13 - 2017/11/17
An optical configuration for a confocal microscope employing a mode-locked laser source is proposed in this paper. Due to high illumination efficiency and a highly stable optical frequency of the mode-locked laser, which is traceable with the national standard of frequency and time, the proposed chromatic confocal microscope is expected to achieve a high axial resolution. In this paper, as a first step of research, design study on the optical setup for the prototype chromatic confocal microscope with the mode-locked laser is carried out.