Effects of stamp properties on transfer-print and its application to fabricate a micro-tactile sensor

抄録

This present study describes effect of surface roughness and young’s modulus of stamp on transfer-print and fabricating a prototype of micro-tactile sensor. Micro-roughness in the range of 4 to 110 nm have provide considerably high releasability of Au thin-film to be transfer-printed. A high modulus (8.2 MPa) of stamp allow to perform transfer-printing of Au thin-film with smaller deformation as compared to that low modulus (1.8 MPa) stamp. With the improvement of stamp properties, a capacitive micro-tactile sensor can be fabricated on a polymer substrate by a transfer-print based process. The capacitance is confirmed to be linearly increases with applied force in the range of 0 to 1 N.