A Study on Machining Error Estimation of Micro Complicated Shapes by On-machine Scanning Measurement

抄録

From the nature of ultraprecision machining, all sorts of error greatly affect machining accuracy if the errors are very small. In addition, the shapes to be machined shift to more complicated curved surface such as a non-axisymmetric and non-spherical shape. Therefore, in order to improve machining accuracy, on-machine measurement devices have been developed so that corrective machining can be conducted without removing a workpiece from machine tool. However, the relationship has not been clarified between machining error and probe displacement in multi-axis control scanning. In this study, in order to realize on-machine scanning measurement by multi-axis control, machining error is estimated and machined shape is compared with the measurement result obtained with a confocal microscope.