Fabrication of Microlens Array Molds by Indentation Method Using Sintered Porous Metal

抄録

To efficiently produce lens array molds, we have proposed a method for forming lens elements by indentation, which uses a porous metal plate as a workpiece. In the present paper, we demonstrate a new method for improving the reproducibility of the element shape, in which each indentation is terminated when the indentation depth reaches a specific value. To investigate the applicability of our method to the fabrication of microlens array molds, we processed a mold with nine elements, each having a depth of 80 μm. The elements were successfully formed with a depth variation of approximately 4 μm.