Realization of arbitrary phase control of dual-periodic structures using interference lithography

抄録

This research aims to establish fabrication method of hierarchical-period gratings, which are nano-and micro-surface structures composed of several different periods. In this report, we discuss how to control the phase shifts between each period in the fabrication process. A previous research had proposed the controlling method of the phase shifts using a reference grating. We applied this method to fabrication of dual-period grating with an arbitrary phase shift and conducted fabrication experiments of dual-period gratings using Lloyd’s mirror setup controlling the phase shift to be π or π/2 [rad]. At the result, it was verified that the phase shift was successfully controlled.