Manufacturing of glass probe for measuring the surface light intensity distribution of spherical WGM resonance

抄録

A metrology method for determining the probe sphere diameter of a micro coordinate measurement machine (CMM) based on Whispering Gallery Mode (WGM) resonance has been proposed. In this study, the electric field intensity distribution of WGM resonance on the microsphere surface will be measured using a near-field optical probe to obtain the angular mode number, which is necessary to estimate the diameter accurately. In this paper, a glass probe was manufactured through heat-pulling, and the aimed probe tip shape was attained.