Experimental Evaluation of Reaction Induced Slurry Assisted Grinding for BK7 Optical Glass

抄録

A more accurate and more efficient grinding method for optical glasses is demanded as high-resolution imaging devices become more popular. We propose a reaction-induced-slurry-assisted (RISA) grinding method as a chemical mechanical grinding method using cerium oxide slurry instead of ordinary coolant. In this study, the grinding performance of RISA grinding for BK7 optical glass is experimentally evaluated from the viewpoints of sub-surface damage and repeatability of ductile regime grinding at various wheel feed rates. From the grinding tests, RISA grinding causes less sub-surface damages and successfully generates ductile regime surface repeatedly under 3.0 mm/min wheel feed rate.