High precision cavity length measurement of external cavity diode laser

抄録

In recent years, machine tools, industrial equipment, and measuring equipment have become finer and more accurate. On the other hand, the range of measurement/processing is expanding. Therefore, the development of accurate length measurement technology that is highly accurate and robust to the environment is required. In this study, we proposed the external cavity diode laser with the dual-periodic grating, where laser beam having two separated wavelengths are excited. Using two wavelengths, the mode number could be determined precisely. We aimed for verification experimentally.