抄録
Studies on optical switches have been researched and developed for optical information networks for a highly developed information technology society. In reality, however, a manipulator cannot apply for multi input and output due to a rather small output displacement at mirror parts of actuators. Therefore, in order to develop optical switches capable of switching multi input and output, we suggest an electrostatic driving-type micro-manipulator that is capable of large angular output displacement by low applied voltage. The actuator is driven by the method of suction between the beam supporting a mirror and the fixed plate with a insulating membrane on it.
