抄録
Diamond is a high-performance material in many ways : e.g., mechanically, it has the highest hardness; thermally, the highest thermal conductivity; chemically, high stability in various atmospheres at ordinary temperatures; and electrically, high insulation. The goal of this study is to fabricate a maintenance-free micromachine system, equipped with diamond elements, that can function under severe conditions, in the human body for example, for a long period. As the first step of this study, the authors fabricated a micromanipulator having a diamond end-effector that can handle microelements, as small as several to several tens of micrometers, made of CVD diamond film. And next, reversal mechanism was added at this end-effector in order to attempt efficiency improvement of the work. The result was good, when the micro manipulation work was carried out using this system.
