抄録
Amorphous Carbon Nitride (CNx) coating is an attractive material that satisfies both relatively high hardness and ultra-low friction coefficient. We tried to obtain CNx by using plasma-enhanced chemical vapor deposition (PECVD), which is more suitable for 3-dimensional coating than typical physical vapor deposition methods. In this work, the friction characteristic under oil lubricated of the Si-CNxHy film deposited by PECVD was made clear from the relation between the Raman spectroscopic analysis which is an index of carbon structure, and friction coefficient.
