ta-CNx膜の油中高耐摩耗の発現とメカニズムの検討

抄録

CNx (carbon nitride) coating is an attractive material due to low friction coefficient. However, our previous research reported that the wear resistance of CNx deposited by IBA-ED (Ion Beam Assisted－Electron beam Deposition) was insufficient. In order to overcome this problem, we deposited CNx with higher hardness and non-droplet using IBA-FAD (Ion Beam Assisted－Filtered Arc Deposition), and this film showed high wear resistance. We termed the new CNx as ta-CNx (tetrahedral amorphous－Carbon Nitride). More interestingly, ta-CNx showed higher wear resistance with higher N/C ratio regardless of hardness decreasing. Here we show the mechanical and the fictional properties of ta-CNx.