ガス吹きつけMVP法によって超高速成膜されたDLCの膜厚分布に及ぼす吹きつけガス入射東の影響

抄録

Recently, 1-by-1 coating equipment for DLC coating process, which replaces conventional mass-production way with a huge chamber, is strongly desired in terms of downsizing apparatus and space-saving. In order to achieve this purpose, ultra-high-speed coating tith deposition rate of aver 1000 μm/h, which is 1000 times larger that that (~ 1μm/h) of conventional method, is required. The deposition rate of over 1000 μm/h was already achieved with integration of gas blowing to substrate and high-density-plasma (ne~10¹¹ - 10¹³) in our previous work. However, the mechanism of enhancement of the deposition rate is not still clarified. In this work, we elucidated the mechanism while focusing on the relationship between impingement rate of gas to substrate and thickness distribution of DLC. We found that both distribution of thickness and impingement rate closely matched. Moreover, we suggested some radicals with higher sticking coefficient have something to do with above-mentioned ultra-high-speed coating.