力ンチレバー一体型3次元マイクロステージの開発とトライボロジー計測への応用に関する研究

抄録

Three-dimensional microstage (3D microstage) is driven by electrostatic comb actuators that provide continuous motion along three axes (X, Y, and Z) with low hysteresis, and it is used as a drive system of an atomic force microscope (AFM). In this study, we developed a cantilever-integrated three-dimensional microstage (Cl-3D microstage), in which a cantilever is mounted directly onto the SOI (silicon-on-insulator) substrate on which the 3D microstage is fabricated. The CI-3D microstage was installed in a commercial AFM, and friction distribution were measured. As the results, the relationship between scanning speed and friction force showed a similar behavior to the Stribeck curve. Moreover, friction loop measurements were performed at three different scanning speeds, and friction force was measured at effective load of 0 nN.