ESEM内表面エネルギーその場評価装置の試作と有効性の検証

抄録

Carbonaceous hard coatings have great properties, such as low friction, high hardness and high wear resistance. In particular, CNx (Carbon Nitride) coating and a-C:H (Hydrogenated amorphous carbon) coating show ultra low friction coefficient (μ<0.01) in dry nitrogen gas. However, the mechanism of ultra low friction has not clarified. We should develop the in-situ measurement method of friction area during friction to clarify this ultra low friction mechanism of carbonaceous hard coating. In this research, we demonstrated in-situ measurement of surface energy on friction area during friction by manufacturing friction tester in ESEM (Environmental Scanning Electron Microscope) chamber. Moreover, we estimated the change of surface energy by friction.