研磨装置用樹脂部品のエロージョン摩耗に対する加速評価試験法の開発

抄録

In this study, the erosion of the polishing machine parts was evaluated by Micro slurry-jet Erosion (MSE) method using spherical alumina particles with a diameter of 300 μm. The erosion surface of the polishing machine parts and polyvinyl chloride (PVC) material by MSE method were found to show similar in. Also, the difference of evaluated on the outside and inside of PVC specimen, which is the result that the inside is superior to the outside in erosion resistance during injecting a great number of particles. These results suggest that the MSE method using spherical particles with a diameter of 300 μm is the one of the effective tools for evaluating erosion on polishing machine due to injecting particles.