抄録
We proposed novel high-throughput characterization method of crystallization property of thin film amorphous alloys for combinatorial searching approach. Crystallization of integrated, deposited, thin and tiny amorphous alloy samples can be detected at once by a commercial thermography as changes of their emissivity. In this report, high-throughput characterization of crystallization temperature (Tx) was demonstrated using three thin film libraries on which compositional distributed PdCuSi thin film amorphous samples were deposited by combinatorial arc plasma deposition. As a result, Txs of 285 samples were evaluated and it took only 14 days. Two Txs selected from the all 285 evaluated Txs were compared with results of conventional method, differentials scanning calorimetry. The maximum difference of the two methods was 8K. In terms of throughput, the proposed method achieved 10 times speed than the conventional method and 66% reduction of characterization time. From these results, the proposed method is powerful tool for combinatorial searching for novel thin film amorphous alloys.
