J161011 圧電ナノワイヤの傾斜配向と樹脂転写を利用したマイクロ発電デバイスの創製

抄録

We suggested the novel transfer method of tilted ZnO nanowires (ZnO NWs) for the high output flexible micro power generator. High density tilted NWs were synthesized and transferred to a resin (PMMA). The transfer contributes to making the directions of all ZnO NWs' polarization uniformed and maintaining their high density and tilt configuration on the other system. That means all ZnO NWs can contribute to electrical output through the electrodes attached on the top and the bottom. The tilt configuration contributes to giving ZnO NWs larger strain compared to vertical ZnO NWs when they are added compressive stress from the both sides In the transfer method, PMMA was melted with heating, on which the substrate ZnO NWs synthesized on was put upside down. They were cooled with PMMA becoming solid. As the tips of NWs were fixed by PMMA, ZnO NWs were transferred after peeling the synthesis substrate off. Transferred ZnO NWs held their morphology and directionality, and the length of their transferred parts got longer with the thickness of PMMA got thicker The power generator fabricated on this method has much possibility for higher electrical output.