Abstract
A flow channel with a sub-micrometer feature size is attractive for applications such as bio-chemical assay and molecular synthesis. We here introduce a novel two-step fabrication technology, which is femtosecond laser drawing and development, for an embedded hydrophilic flow channel with a 100-nm feature in its cross section and an extremely high aspect ratio, which does not necessitate any post-capping process. We discussed the potential of this technology and confirmed to obtain grid-like channels spread from the via hole in a manner like random walk, vertical stacking of channels, an aspect ratio of an embedded channel reached 25000, and embedded curved nanochannels.
