Abstract
In recent years, AlN attracts attentions as heat sink materials for discrete semiconductor devices because AlN has the characteristics necessary for heat sink. But it can't be formed complex shape by net shape. So we try to establish mass production technology of sintered AlN parts having high thermal conducting and complex shape by vibrational compaction process and milliwave sintering. The frequency of vibration and the amplitude is controlled as frequency condition. The compaction is evaluated by measuring sedimentation speed, compaction speed and relative density. As a result, compaction speed and particle filling rate are improved by the molding method. But compaction speed is improved by minute vibration against particle filling rate improved by large vibration. Maximum impression speed is 5.5 times as fast as spontaneous sedimentation that. But it is not enough to improve particle filing rate in this energy rage and compaction don't have high packing dencity. So clearly sintering characteristic is confirmed by milliwave sintering.
