抄録
Unlike typical high precision machines assembled from prescreened parts that have been produced from appropriate materials through the most suitable manufacturing processes, most MEMS (micro electro mechanical systems) devices do not have such luxury due to the limited options in materials and processes available from the standard semiconductor fabrication technologies. In the field of MEMS design, it sometimes urges us to put more than one functions into a single component or layer, by considering the best use of the material properties and processes. In this paper, we use two examples of our MEMS application devices in micro optics and radio frequency to introduce such integrated design concept behind the developed microstructures.
