抄録
This paper introduces driven methods for curled-up type electrostatic micro actuator made of thin film metallic glasses. One of the methods achieves analog motion over the full range of its stroke without closed loop control system. The device consists of a curled-up moving electrode that delivers large deflection in the out-of-plane direction and a taper-shaped base electrode. A prototype device achieves analog motion for 70% by rectangular AC voltage from 0V to 400V. Another method removes remnant charge that can cause a moving electrode to "stick" to its insulator and demonstrates the effectiveness of the method experimentally. The method is applicable to many types of MEMS because it does not require any change to the actuator fabrication process, structure, dimensions or materials. The only modification is to the waveform of the applied voltage.
