抄録
A water driven stage,which is composed of water hydrostatic bearings and the water hydraulic piston mechanism,was developed for liner stage for ultra-precision machine tool,especially,for machining small parts in size.Speed of the water driven stage can be controlled by the supplied water flow rate into the piston-cylinder by use of electromagnetic proportional flow control valve.The purpose of this study is to control the speed of feed motion of the table.In this paper,influence of step load changing on the table of the stage is evaluated by experiments and simulations.It is then verified that the designed feedback control system effectively reduces the influence of the external load acting on the table.
