抄録
Optical property of a metal nanodot array fabricated by the controlled self-organization method is studied. The fabrication method is composed of three steps, i.e. the spatter coating of metal layer, patterning of groove grid, and self-organization by thermal dewetting. It was found that the absorption spectrum of a nanodot array shows a sharp peak due to Surface Plasmon Resonance (LSPR). Since the peak wavelength depends on the dot size, the peak wavelength can be tuned by the process conditions such as grid size and coating condition. It is also found that the peak wavelength depends on the refractive index of medium spotted on the nanodots. Thus, the refractive index can be evaluated by measuring the peak wavelength. Finally, it is also reported that adhesion of nanodots to the substrate is improved by employing spatter etching to the substrate before spatter coating of metal layer.
