抄録
In this paper, we proposed a 2D polymer-MEMS mirror made of negative photoresist SU-8 containing magnetic particles as a magnetically driven actuator. It is important to evaluate the material reliability of a polymer applied for movable structures. So, we analyzed the proposed mirror structure using a finite element analysis based on obtained mechanical and magnetic properties of the used polymer. From the analytical results, the proposed mirror is actuated with the optical deflection angle 20deg. under the fracture stress 40MPa of the composite, and analytical frequency characteristic is similar to the experimental result.
