抄録
In this study, we quantitatively measured fundamental shrinkage ratio of PDMS under various curing condition to solve the misalignment problem of PDMS fabricated by the soft lithography for integrated microfluidic systems having over 100mm square. It is experimentally confirmed that the curing of PDMS is expressed by the Arrhenius equation, and we precisely evaluated the shrinkage ratio in the change of the curing temperature, curing time and the PDMS layer thickness using the curing constant derived from the curing rate constant. From the results, there are a proportional relationship to the shrinkage ratio and the curing constant, and the effect of the initial heat treatment. It is possible to predict the shrinkage ratio of PDMS and improve alignment accuracy by applying the obtained shrinkage ratio for the design of a photomask.
