抄録
We present a large deflection optical scanner driven by low power consumption without resonant. Low rigidity polymer SU-8 is applied for drive hinges of the proposed MEMS-mirror. Regarding the problems of viscoelasticity polymer in a MEMS device, in this study, we present the angular rate sensor integrated in the polymer-MEMS mirror induced electromotive force. The fabricated mirror deflects over ±30deg. at non-resonant frequency. Resonant frequency is 49.5Hz and Q factor 24.8. The output signal from the integrated sensor is superimposed on the large noise. Since the output signal through the lock-in detection is the proportion to the deflection angle, the feasibility of amplitude control of the proposed polymer MEMS mirror.
