抄録
For the purpose of high sensitive respiratory gas analysis, we fabricated a graphene gas sensor and evaluated the properties. A single layer graphene was prepared by the Scotch method and the number of layers was evaluated by Raman spectroscopy. Electrodes were attached to the graphene by electron beam lithography and metal deposition. After wire bonding, we achieved a graphene sensor device. In order to check the properties of the fabricated graphene sensor, we measured the electrical conductance change in the various concentration of acetone around the sensor. As a result, in the high concentration of acetone, the conductance of graphene decreased. We estimated the rate of conductance change per 1ppm of acetone was 4×l0^<-5>. This change was so minute that for the measurement of ppm order of acetone, reduction of the noise and improvement of the sensitivity of the graphene sensor should be required for realization of respiratory gas analysis, especially as a wearable sensing device.
